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Wafer appearance inspection equipment Product List

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Wafer Appearance Inspection System "OVS-5120 Series"

Win the intensifying competition! Introducing high-performance machines at low cost.

The "OVS-5120 Series" is a wafer appearance inspection device that sets wafers supplied from the load port onto an XYθ stage and performs critical defect detection using a high-speed, high-resolution color area camera. It ensures that good products are not mixed with defective ones by utilizing special lighting and software for stable defect detection. Additionally, it is equipped with unique learning software that absorbs variations between lots. 【Features】 ■ Incredible detection capability ■ Reproducibility ■ Strong adaptability in the field ■ Easy recipes for anyone ■ Low-cost/high-performance machine *For more details, please refer to the PDF materials or feel free to contact us.

  • Visual Inspection Equipment

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